The dream of finding life on an alien Earth-like world is hampered by a number of technical challenges. Not the least of ...

ZYGO provides technologies that allow trustworthy measurements in harsh surroundings where air turbulence and vibration could make conventional optical metrology hard or impossible. The Verifire™ ...

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This study examines interferometric techniques for distance measurement, focusing on innovations that mitigate air turbulence and refractive index fluctuations.

Extreme ultraviolet lithography extends photolithography to much shorter wavelengths and is a cost-effective method of producing more-advanced integrated circuits. Although some infrastructure ...

However, the move from 193 nm excimer laser technology to 13.5 nm EUV ... small wavelength band around 13.5 nm. A typical optical system for lithography contains 11 components, so the total ...