A new method for shear-phase retrieval in double-grating Ronchi lateral shearing interferometry was proposed, which enhances the accuracy of wavefront measurements by effectively suppressing ...

Phasics' unique patented wavefront sensing technology is called quadriwave lateral shearing interferometry (QWLSI). This technology was developed to overcome the Shack-Hartmann limitations: it offers ...

Thin film thickness measurement option measures film thickness using ZFT reflectometry principles. ZSI shearing interferometer provides Angstrom-level vertical resolution. PSI phase shifting ...