Abstract: A laser gas sensor with phase compensation in free space is designed based on a half-mirror and mixer in this study. The half-mirror is employed to split the returned beam into transmitted ...

Department of Materials Science and Chemical Engineering, Hanyang University, Ansan 15588, Republic of Korea Department of Materials Science and Engineering, Korea Advanced Institute of Science and ...

Furthermore, the sensor demonstrates selectivity among NO2, NO, HCHO, ethanol, and NH3 gases at room temperature. In summary, the CMOS-MEMS Schottky gas sensor with asymmetric metal contacts shows ...