The electronics of the future can be made even smaller and more efficient by getting more memory cells to fit in less space. One way to achieve this is by adding the noble gas xenon when manufacturing ...

Abstract: The improved thermal stability of cobalt silicide (CoSi2) becomes pivotal with the introduction of a 4F2 cell architecture, featuring a vertical pillar transistor for DRAM application. To ...

The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acs.chemmater.4c01638. Characterization data and analysis by PXRD, TEM ...

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Contacts require a metallurgically sound ohmic connection between the metal and silicon, which is accomplished by forming a silicide. By annealing at high temperatures, the metal and silicon create ...